MEMS激光雷达ζ　综述

乔大勇; 苑伟政; 任勇

doi:10.19304/J.ISSN1000-7180.2022.0803

MEMS激光雷达综述

doi: 10.19304/J.ISSN1000-7180.2022.0803

乔大勇^{1, 2,},
苑伟政^{1, 2},
任勇³

1.
西北工业大学空天微纳︽系统教育部重点实验室, 陕西西安 710072
2.
西北工业大学陕西省微/纳米系统重点实验室, 陕西西安 710072
3.
西安知微传感①技术有限公司, 陕西西安 710075

基金项目: 国家自然科学基金（U21B2035）

详细信息

作者简介:
乔大勇：男,（1977-）,教授,博士生导师. 研『究方向为光学MEMS芯片及】其应用、先进MEMS制造♀工艺等.E-mail：dyqiao@nwpu.edu.cn

苑伟政：男,（1961-）,教授,博士生导师. 研究方向为MEMS集成设计理论与方法、微纳◥制造工艺技术、特种MEMS器件及其系统集成等

任勇：男,（1987-）,硕士. 研究方向为光学MEMS芯片及其应用

中图∞分类号: TN958.98
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- 被引次数: 0
出版历程
- 收稿日期: 2022-12-01
- 修回日期: 2022-12-16
- 网络出版日▼期: 2023-01-18

Review of MEMS LiDAR

QIAO Dayong^{1, 2
,},
YUAN Weizheng^{1, 2},
REN Yong³

1.
Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, China
2.
Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi’an 710072, China
3.
Xi’an Zhisensor Technology LTD, Xi’an 710075, China

Funds: Sponsored by the National Natural Science Foundation of China (Grant No. U21B2035)

摘要

摘要:
近年人工智能飞速发展，自动驾驶、智能驾驶已进入产业元年. 激光雷达技术作为最为重要的自动驾驶◇视觉感知设备,正在进行不断的发展与迭代. 本文旨在介绍激光雷达及其国内外研究现状. 文中着重介绍了MEMS固态激光雷达的核心部件MEMS微振镜的技术参数及指标,如视场角、光学孔径、扫描速度、扫描频率、MEMS微振镜尺寸以及品质因数. 最终汇总了车载激光雷达的应用现状,展望车载激光雷达的未来与发展.
- 激光雷达 /
- MEMS激光雷达 /
- MEMS微振镜
Abstract:
With the rapid progress of AI, autonomous driving and intelligent driving have stepped the first year of the industry. As the most important sensor in automatic driving, LiDAR technology is developing and iterating continuously. This paper introduces LiDAR, the research status home and abroad, and the key points and future of MEMS solid-state LiDAR. This paper introduces the technical parameters and indexes of MEMS mirror, the core component of MEMS LiDAR, such as field of view angle, optical aperture, scanning speed, scanning frequency, MEMS mirror size and quality factor(FoM). Finally, the application status of vehicle-mounted LiDAR is described, and the future and development of vehicle-mounted MEMS LiDAR are prospected.
- Lidar /
- MEMS Lidar /
- MEMS mirror

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图 1 激光雷达工作原理

Figure 1. The principle of LiDAR

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图 2 Velodyne HDL-64E 激光雷达

Figure 2. The Velodyne HDL-64E

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图 3 激光雷达结构及代表产品

Figure 3. The structure of LiDAR and samples

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图 4 激光雷达组成要素

Figure 4. The elements of LiDAR

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图 5 MEMS激光雷达原理

Figure 5. The principle of MEMS LiDAR

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图 6 MEMS微振镜厂家及技术路径介绍

Figure 6. The players in MEMS mirror

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图 7 单轴MEMS振镜的激光雷达以△ “线”扫“面”

Figure 7. The MEMS LiDAR with single-axis of MEMS mirror

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图 8 放置于旋转电机上单轴MEMS振镜

Figure 8. The single-axis MEMS mirror mounted on rotating motor

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图 9 双轴MEMS振镜的激光雷达以“点”扫“面”

Figure 9. The MEMS LiDAR with double-axis of MEMS mirror

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图 10 采用单颗MEMS微振镜+8组光学模组扩＠大视场角

Figure 10. A single MEMS mirror with 8 optical modules used to enlarge the FoV

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图 11 MEMS微振镜隔振器

Figure 11. The isolation of MEMS mirror

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表 1 自动驾╳驶常见传感器对比

Table 1. The comparison of sensors for autonomous driving

传感器	优势	劣势	测距范围
摄像头	技术成熟，价格便宜	雨雪天气，效果太差	<100 m
毫米波雷达	探测◣距离远，受天气影响较小	难以探测行人	>200 m
激光雷达	测距精度高，方向性强，响应快	成本高，极端环境下无法使用	≈200 m

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表 2 激光雷达技术◤路径

Table 2. The technical path of LiDAR

技术路径	优势	劣势
机械式	环形扫描，供应链成熟	硬件集成ぷ难度大，易磨损，成本高
MEMS	微型化，便于集成，成本低	对于振动敏感
OPA	硅基方案，成本低，一致性好	技术难度〇大
Flash	不用扫描，短时间内记录整个▽场景	探测距离较短，对于探测∩器要求高

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表 3 主流MEMS激光雷达产品技术参数

Table 3. The key parameters of LiDAR

企业	产品	探测距离/m	视场角度/°	角分辨率/°	激光波长/nm
速腾聚创	M1	150	120*25	0.2*0.1	905
Innoviz	ONE	250	115*25	0.1*0.1	905
Luminar	IRIS	250	120*30	0.06*0.06	1550
华为	N.A	150	120*25	0.25*0.26	905
Velodyne	H800	170	120*16	0.22*0.25	905
一径科技	ML-Xs	200	120*25	0.1	1 550

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表 4 不同应用的激光雷达对于MEMS振镜技术参数的最低要求

Table 4. The requirement of different application of LiDAR

Application	FOV/°	Mirror Size/mm	Resonant frequency/kHz
智能驾驶	25	2	0.8
盲点监测	120	1	0.5
动作识别	50	0.5	0.2
扫地机器人	25	1	0.2
无人机	30	1	0.4

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